Generation of a Metamodel for a Micromachined Accelerometer using T-SPICETM and the IZ-Optimality Option of I-OPTTM
نویسندگان
چکیده
We demonstrate a new method for dynamical parametric simulation of MEMS using IZ-optimal designs for FEA simulations, fitting using the best linear unbiased predictor, and extraction of relevant coefficients for solution of the appropriate ODE using T-SPICE. A five-factor microaccelerometer example demonstrates that highly accurate dynamical simulations are possible, in some cases, using a very small number of static FEA simulations.
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تاریخ انتشار 2000